Auger Electron Spectroscopy (AES)
Uses
Applications
Technical Specifications
Alternatives
Auger Electron Spectroscopy (AES) is a technique used to determine the composition of the surface layers of a sample or object by using a beam of electrons to knock electrons out of inner-shell orbitals. The AES is used to detect elements in the first atomic layers of a solid surface.
- Sub-micrometer resolution imaging of surfaces and features
- Quantitative elemental analysis of surface contamination and particles
- Depth profiling
- Depth profiling of thin films for composition/stoichiometry down to the low % level
- Elemental analysis of surfaces after chemical treatment
- Small spot analysis of samples with multiple structures/features
- Defect analysis
- 0.1 um spatial resolution
- For elemental analysis of insulating materials: XPS, SEM
- For higher resolution imaging: SEM, TEM
- For higher sensitivity quantitative depth profiling: SIMS
- For higher sensitivity quantitative elemental analysis of surfaces: SIMS, TXRF, VPD-ICP-MS