Transmission Electron Microscopy (TEM)
Uses
Applications
Technical Specifications
Alternatives
Transmission Electron Microscopy (TEM) is a technique that transmits a beam of electrons through an ultra thin sample (0.5um or less), creating an image of the interaction of electrons and the sample as the beam passes through it. The TEM is capable of attaining magnifications beyond 1,000,000x.
- Ultra-high resolution imaging of structures and features
- Electron diffraction to identify crystal structure
- Plan-view and cross-sectional imaging of solid samples
- Accurate measurement (Angstrom-scale) of size and dimension of structures/features
- Particle size distribution
- 1.4Å point resolution in HRTEM mode and 1.7Å resolution in STEM mode
- HAADF, EELS and EDS X-ray microanalysis capabilities
- To image micrometer-scale features: SEM, AES
- To obtain composition of films or features: AES, SEM-EDS, STEM-EELS
- To quantify long-range surface roughness: AFM