Scanning Transmission Electron Microscopy (STEM)
Uses
Applications
Technical Specifications
Alternatives
The Scanning Transmission Electron Microscope (STEM) is a type of Transmission Electron Microscope (TEM) which uses electrons to pass through an object or sample. Like the Scanning Electron Microscope, the electron beam is focused into a narrow spot which is scanned over the sample in a raster pattern.
- Ultra-high resolution imaging of structures and features
- Sub-nm size probe size for spatially-resolved elemental analysis
- X-ray and electron energy loss spectroscopy (EELS) from sub-nm features/structures (images, line-scans, site-specific analyses) with sensitivity at the low %-level
- High angle annular dark field (HAADF) imaging to enhance Z-contrast
- 0.19nm STEM HAADF (High-angle annular dark field) resolution
- To obtain composition of larger films or features: AES, SEM-EDS
- For quantitative compositional analysis of large features: AES, SIMS
- To quantify long-range surface roughness: AFM