Scanning Electron Microscopy (SEM)
Uses
Applications
Technical Specifications
Alternatives
Scanning Electron Microscopy (SEM) is a technique that produces images of an object or sample by scanning the surface with a focused high-energy beam of electrons in a raster scan pattern. During the scan, the electrons generate a variety of signals at the surface of the object which help reveal information including external texture, chemical composition, and crystalline structure and orientation. The SEM is capable of providing analyses of selected point locations on the object or sample with a magnification range of 10x to 100,000X.
- High resolution imaging of surfaces and structures
- Elemental composition when combined with electron-induced x-ray spectroscopy
- Top-down, tilt, and cross sectional imaging of surfaces and structures
- Accurate measurement of size and dimension of structures/features
- Imaging of grains and grain boundaries in metals
- Optional post-prep etches to enhance contrast and highlight features
- Ultra high resolution characterization at high or low voltage in high vacuum - 1.4nm@ 1kV
- 2.3nm resolution at 1kV
- 1.2nm resolution at 5kV
- To image nanometer-scale features: TEM
- To image millimeter-scale features: Optical microscopy
- To obtain composition of sub-micron particles or features: AES, STEM-EELS
- To quantify long-range surface roughness: AFM