Atomic Force Microscopy (AFM)
Uses
Applications
Technical Specifications
Alternatives
Atomic Force Microscopy (AFM) is a technique that uses a tiny probe mounted on a cantilever to scan the surface of an object or material all the way down to the level of the atom. As the probe travels the surface, attractive and repulsive forces arising between it and the atoms on the surface of the object induce forces on the probe that bend the cantilever. The amount of bending is measured and recorded, providing a map of atoms on the surface of the object. AFM is also referred to as Scanning Force Microscopy.
- Angstrom-level measurement of
- surface micro-roughness
- topography
- step-height
- feature size
- Quantitative micro-roughness measurement of solid surfaces
- Visualization of step structures in epi-Si
- Measurement of sidewall roughness of etched trenches and vias
- Observation of damage to lithography reticles
- Sampling Area: Approx. 0.1um to 100um
- For large step heights: SEM
- To obtain composition of particles or features: AES, SEM-EDS, SIMS, STEM-EELS