Advanced Microscopy
SVTC provides microscopy services which utilize a comprehensive suite of advanced microscopes to reveal details of structures at the atomic level from nano to macroscopic levels.
- Surface Imaging and Micro-roughness measurements
Scanning Electron Microscopy (SEM)
- Etch verification
- Thickness measurements (critical dimensions)
- Feature measurements (trenches, vias, transistors)
Voltage contrasting - Hg probe for k values and capacitance measurements
Transmission Electron Microscopy (TEM) & High-Resolution TEM
- Gate oxide and thin film metrology
- Cross-section and plan-view sample analysis
- Specific area/feature analysis for failure analysis (FA)
- SAED and CBED diffraction
- Crystal identification and orientation
- Silicon and III-V-based materials
- High-resolution phase contrast imaging
- Digital diffractogram analysis
- Complete set of sample prep tools for polishing/milling
- Holography
- Energy Filtered Imaging
Scanning Transmission Electron Microscope (STEM)
- X-ray and electron energy loss spectra
- Scanning TEM HAADF (Z-contrast) imaging
- EELS and EDXS linescans
- Elemental identification
- Semi-quantitative standard-less compositional analysis
- Chemical profiling with sub-1 nm sampling region
- Energy Filtered Imaging
- Non-destructive TEM sample preparation and
cross-section techniques up to 200 mm - Etch verification
- Thickness measurements
- Feature measurements (trenches, vias, transistors)
- Rapid time to data and root-cause analysis of yield
excursions from common process steps - "Slice and View" automated software for
high-precision
SEM cross-sectioning - High-throughput TEM sample preparation with
optional in-situ "lift out" capability